General Description
The MTPD001 series piezoresistive pressure sensor dies are manufactured on six inch silicon wafers
in a class 100 clean room using a state-of-the-art 1.2 micron CMOS facility and are then bulked
micro-machined in a class 1000 clean room. The wafers are batch manufactured using an electrochemical
etch-stop process to achieve excellent repeatability.
Applied pressure deforms a diaphragm causing piezoresistors to change their resistance. This change
in four resistors, which constitute a Wheatstone Bridge, results in a pressure proportional voltage.
Dies are probed, inked, diced, visually inspected and shipped on tapes, in rings or in waffle packs.
Dies can be mounted on ceramic or PCB substrates or packaged in application specific packages for
measuring pressure in non-corrosive media.
Features
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Measure positive & negative pressure
Piezoresistive bridge
Surface passivation
Solid state
High reliability, sensitivity
Optimally sized for application
Low cost design
Meets industry specifications
6" wafer availability
100% factory tested
Excellent repeatability
Rated pressure of sensor
0 to 1 psi
Main Fields of Application
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Air flow monitoring
Process control monitoring
Medical instrumentation
HVAC